silicide/Si interface than at the Si/Si interface Dopant Redistribution in Silicide/Silicon Silicides are polycrystalline by nature with large density of grain boundaries. There are a lrge number of defects in grain boundaries. As a result the diffusity in silicides is very high. Dopant from Si can readily redistribute into a silicide. N+ ...
Ni-silicide is sensitive to temperature and often at low temperature a NiSi2 is formed. This phase is usually seen on strained PMOS structures and can create an increase of contact resistance. Non uniform distribution of silicide process was the biggest show-stopper for this old process.
Sodium silicate is a generic name for chemical compounds with the formula Na 2x SiO 2+x or (Na 2 O) x · SiO 2, such as sodium metasilicate Na 2 SiO 3, sodium orthosilicate Na 4 SiO 4, and sodium pyrosilicate Na 6 Si 2 O 7.The anions are often polymeric.These compounds are generally colorless transparent solids or white powders, and soluble in water in various amounts.
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